Research Progress of Fluxgate Sensor Based on Micro Electro Mechanical System (MEMS)

Chen Jiamin's team from the Chinese Academy of Sciences: Research progress on fluxgate sensors based on microelectromechanical systems (MEMS)

The following articles are from the editorial department of magnetic materials and devices, and the author is from the editorial department of Magnetic Journal

team introduction

Mr. Chen Jiamin, researcher of the "State Key Laboratory of Sensing Technology" of the Aerospace Information Innovation Institute of the Chinese Academy of Sciences, a doctoral supervisor, a candidate of the "Hundred Talents Program" of the Chinese Academy of Sciences, a special researcher (fellowship) of the Japan Society for the Promotion of Science (JSPS), IEEE Magnetics Member of the society, member of the National Council of Materials and Devices Magnetic Materials Expert Group expert.

Adjustable constant current electronic load - charging treasure tester - aging discharge module - fast charge and discharge resistor

He has been engaged in the research of new sensing materials, magnetic sensors, spintronic physics, materials and devices for a long time. He has presided over and participated in Japan's "Disruptive Technology Innovation Plan" project, the Japan Society for the Promotion of Science's scientific research fund basic research S-level project, A-level project, B-level project, special researcher project and Advanced Storage Technology Association project, etc., and is currently in charge of national key research and development There are many scientific research projects such as planned young scientist project, National Natural Science Foundation project, Beijing Natural Science Foundation project, Chinese Academy of Sciences talent project, Chinese Academy of Sciences instrument and equipment function development project, and enterprise entrusted project.

Adjustable constant current electronic load charging treasure tester module

Article guide

Fluxgate sensors are a type of vector magnetic sensors that can detect weak low-frequency or DC magnetic fields. Because of their advantages in resolution, temperature stability, accuracy and sensitivity, they are widely used in magnetic navigation positioning, space detection, mineral detection, Geomagnetic detection, current detection and other fields. In order to meet the emerging applications of micro-components and systems, the miniaturization of fluxgate sensors has become a research hotspot of fluxgate sensors. Micro-electro-mechanical System (MEMS) processing provides a technical basis for the miniaturization of fluxgate sensors. This paper summarizes the basic principles of fluxgate sensors, and expounds the development history of micro-fluxgate sensor technology, including micromachining technology, PCB technology and MEMS technology. The development process of MEMS fluxgate structure technology and the development status of MEMS orthogonal fluxgate are summarized, and the future research focus in this field is prospected.

Key words: fluxgate sensor; MEMS; magnetic measurement; application

1 Introduction

Fluxgate sensors are a class of vector magnetic sensors that can detect weak low-frequency or DC magnetic fields. Traditional fluxgate sensors are widely used in magnetic navigation positioning, space detection, mineral detection, geomagnetic detection, current detection and other fields due to their advantages in resolution, temperature stability, precision and sensitivity. Various micro drones, handheld devices, micro satellites, micro current sensors, small electronic compasses, biomedicine and other application fields have higher requirements for the quality, volume, power consumption and integration of fluxgates. In order to meet the emerging applications of micro-components and systems, the miniaturization of fluxgate sensors has become a research hotspot of fluxgate sensors.

2 Principle and structure of solid fluxgate

parallel fluxgate - Research Progress of Fluxgate Sensor Based on Micro Electro Mechanical System (MEMS)

3 Fluxgate miniaturization history
3.1 Micromachined Fluxgate
3.2 PCB Fluxgate
3.3 MEMS Fluxgate
4 MEMS Fluxgate Research
4.1 Technology
4.2 Structure
4.3 Orthogonal Fluxgate
5 Application of MEMS Fluxgate
5.1 Robots
5.2 Current Test
5.3 Biomagnetic detection
5.4 Space Exploration
6 Epilogue

in conclusion

Over the past three decades, fluxgates have made great progress in miniaturization, and the problems of high noise, low sensitivity, and large temperature drift caused by the miniaturization of fluxgates have been improved. MEMS technology is currently a hot spot in the miniaturization of fluxgates. Fluxgates using MEMS technology have excellent characteristics such as small size, low cost, high integration and high matching, and have been widely used in many fields.
In the future, MEMS fluxgates need to further optimize their structure, manufacturing process, magnetic core material, and circuit matching to obtain probes with higher sensitivity, lower noise, and better structural fit. At present, the two-dimensional fluxgate sensor technology based on MEMS technology is quite mature. It is believed that with the development of MEMS technology, the integrated MEMS three-axis fluxgate sensor should not be far away.