Inkqubela phambili yoPhando lweFluxgate Sensor esekwe kwiMicro Electro Mechanical System (MEMS)

Iqela likaChen Jiamin elivela kwiAkhademi yaseTshayina yeSayensi: Inkqubela phambili yophando kwi-fluxgate sensors esekelwe kwiinkqubo ze-microelectromechanical (MEMS)

La manqaku alandelayo avela kwisebe lokuhlela lezixhobo zemagneti kunye nezixhobo, kwaye umbhali uvela kwisebe lokuhlela leMagnetic Journal

Intshayelelo yeqela

Mr. UChen Jiamin, umphandi we "ILabhoratri yeState Key of Sensing Technology" yeZiko loLwazi lweNzululwazi yoMmandla weZiko leeSayensi zaseTshayina, umphathi ongugqirha, umviwa we "Inkqubo yeetalente ezilikhulu" yeZiko leeNzululwazi zaseTshayina, umphandi okhethekileyo (ubudlelane) yoMbutho waseJapan wokuKhuthaza iNzululwazi (JSPS), IEEE iLungu leMagnetics kuluntu, ilungu leBhunga leSizwe leZixhobo kunye neNgcali yeQela leNgcali yeZixhobo zeMagnetic.

Ukulungiswa komthwalo we-elektroniki wangoku - ukutshaja ubutyebi tester - imodyuli yokukhutshwa kokuguga - intlawulo ngokukhawuleza kunye nokukhupha resistor

Uye wabandakanyeka kuphando lwezixhobo ezintsha zokuva, abenzi boluvo bemagnethi, physics spintronic, izixhobo kunye nezixhobo ixesha elide. Uye wayongamela kwaye wathatha inxaxheba kwiJapan "Isicwangciso soTshintsho lweTekhnoloji esiphazamisayo" iprojekthi, uMbutho waseJapan woPhando lweNzululwazi kwingxowa-mali yophando olusisiseko lweprojekthi yenqanaba le-S, Iprojekthi yenqanaba le-A, Iprojekthi yenqanaba B, iprojekthi yomphandi okhethekileyo kunye neprojekthi yoMbutho woGcino-buchwephesha oPhezulu, njl., kwaye ngoku uphethe uphando oluphambili lwesizwe kunye nophuhliso Kukho iiprojekthi ezininzi zophando lwezenzululwazi ezifana neprojekthi yenzululwazi eselula ecwangcisiweyo, Iprojekthi yeSizwe yeSayensi yezeNdalo, Iprojekthi yaseBeijing yeSayensi yeNdalo, Chinese Academy of Sciences italente iprojekthi, Chinese Academy of Sciences isixhobo kunye neprojekthi yophuhliso umsebenzi wezixhobo, kunye neprojekthi ephathiswe ishishini.

Imodyuli yokuvavanya ubutyebi obunokulungiswa ngokuqhubekayo ngoku kwi-elektroniki

Inqaku lesikhokelo

Abenzi boluvo be-Fluxgate luhlobo lwezinzwa zemagnethi ezinokubona i-frequency ephantsi okanye imimandla yemagnethi yeDC.. Ngenxa yeenzuzo zabo kwisisombululo, uzinzo lobushushu, ukuchaneka kunye novakalelo, zisetyenziswa ngokubanzi kwindawo yokukhangela imagnethi, ukubonwa kwendawo, ukufunyanwa kweminerali, Ukufunyanwa kwe-geomagnetic, ukufunyanwa kwangoku kunye neminye imimandla. Ukuze kuhlangatyezwane nezicelo ezivelayo zamacandelo amancinci kunye neenkqubo, i-miniaturization ye-fluxgate sensors ibe yindawo yophando ye-fluxgate abenzi boluvo. Inkqubo yeMicro-electro-mechanical (MEMS) ukusetyenzwa kubonelela ngesiseko sobuchwephesha kwi-miniaturization ye-fluxgate sensors. Eli phepha lishwankathela imigaqo esisiseko ye-fluxgate sensors, kwaye icacisa imbali yophuhliso lwe-micro-fluxgate sensor technology, kuquka iteknoloji micromachining, Iteknoloji yePCB kunye neteknoloji ye-MEMS. Inkqubo yophuhliso ye-MEMS itekhnoloji yolwakhiwo lwe-fluxgate kunye nobume bophuhliso lwe-MEMS orthogonal fluxgate iyashwankathelwa., kunye nogqaliselo lophando lwexesha elizayo kulo mmandla kulindeleke.

Amagama aphambili: Uluvo lwe-fluxgate; MEMS; umlinganiselo wemagnethi; isicelo

1 Intshayelelo

Abenzi boluvo be-Fluxgate ludidi lwabenzi boluvo be-vector abanokubona i-frequency ephantsi okanye i-DC magnetic fields.. Abenzi boluvo bemveli be-fluxgate basetyenziswa kakhulu kwindawo yokujonga imagnethi, ukubonwa kwendawo, ukufunyanwa kweminerali, ukufunyanwa kwe-geomagnetic, ubhaqo lwangoku kunye neminye imimandla ngenxa yeenzuzo zabo kwisisombululo, uzinzo lobushushu, ukuchaneka kunye novakalelo. Iidrones ezincinci ezahlukeneyo, izixhobo eziphathwa ngesandla, iisathelayithi ezincinci, micro zangoku zangoku, iikhampasi ezincinci ze-elektroniki, I-biomedicine kunye nezinye iindawo zokusetyenziswa zineemfuno eziphezulu zomgangatho, umthamo, ukusetyenziswa kwamandla kunye nokuhlanganiswa kwee-fluxgates. Ukuze kuhlangatyezwane nezicelo ezivelayo zamacandelo amancinci kunye neenkqubo, i-miniaturization ye-fluxgate sensors ibe yindawo yophando ye-fluxgate sensors.

2 Umgaqo kunye nesakhiwo se-fluxgate eqinile

i-parallel fluxgate - Inkqubela phambili yoPhando lweFluxgate Sensor esekwe kwiMicro Electro Mechanical System (MEMS)

3 Imbali yeFluxgate miniaturization
3.1 I-Micromachined Fluxgate
3.2 PCB Fluxgate
3.3 MEMS Fluxgate
4 Uphando lwe-MEMS Fluxgate
4.1 Iteknoloji
4.2 Ulwakhiwo
4.3 I-Orthogonal Fluxgate
5 Ukusetyenziswa kwe-MEMS Fluxgate
5.1 Iirobhothi
5.2 Uvavanyo lwangoku
5.3 Ukufunyanwa kweBiomagnetic
5.4 Ukuhlola iSithuba
6 Epilogue

ukuququmbela

Kwiminyaka engamashumi amathathu edlulileyo, I-fluxgates yenze inkqubela phambili enkulu kwi-miniaturization, kunye neengxaki zengxolo ephezulu, ubuntununtunu obuphantsi, kunye nokukhukuliseka okukhulu kweqondo lokushisa okubangelwa yi-miniaturization ye-fluxgates kuphuculwe. Itekhnoloji ye-MEMS okwangoku yindawo eshushu kwi-miniaturization ye-fluxgates. IiFluxgates zisebenzisa itekhnoloji ye-MEMS zineempawu ezibalaseleyo ezifana nobukhulu obuncinci, ixabiso eliphantsi, ukudibanisa okuphezulu kunye nokuhambelana okuphezulu, kwaye zisetyenziswe ngokubanzi kwiinkalo ezininzi.
Kwilixa elizayo, Ii-fluxgates ze-MEMS kufuneka ziphucule ngakumbi ubume bazo, inkqubo yokuvelisa, Izinto ezingundoqo zemagnethi, kunye nokuhambelana kwesekethe ukufumana iiprobe ezinovakalelo oluphezulu, ingxolo ephantsi, kunye nokufaneleka okungcono kolwakhiwo. Ngoku, itekhnoloji yoluvo lwe-fluxgate enemigangatho emibini esekwe kwitekhnoloji ye-MEMS ivuthiwe. Kukholelwa ukuba ngophuhliso lwetekhnoloji ye-MEMS, inzwa edibeneyo ye-MEMS ye-three-axis fluxgate sensor akufanele ibe kude.