Kukula Kwakafukufuku wa Sensor ya Fluxgate Yotengera Micro Electro Mechanical System (MEMS)

Gulu la Chen Jiamin lochokera ku Chinese Academy of Sciences: Kafukufuku akupita patsogolo pa masensa a fluxgate kutengera ma microelectromechanical systems (MEMS)

Nkhani zotsatirazi zikuchokera ku dipatimenti yokonza maginito ndi zipangizo, ndipo wolemba akuchokera ku dipatimenti yokonza Magnetic Journal

chiyambi cha timu

Bambo. Chen Jiamin, wofufuza wa "State Key Laboratory of Sensing Technology" wa Aerospace Information Innovation Institute of the Chinese Academy of Sciences, woyang'anira udokotala, candidate wa "Hundred Talent Program" ku China Academy of Sciences, wofufuza wapadera (chiyanjano) a Japan Society for the Promotion of Science (JSPS), IEEE Magnetics Member of the society, membala wa National Council of Materials and Devices Magnetic Materials Expert Group katswiri.

Zosintha nthawi zonse zamagetsi zamagetsi - kulipiritsa chuma choyesa - ukalamba discharge module - kudya mwachangu ndi kutulutsa koletsa

Iye wakhala akuchita kafukufuku wa zipangizo zatsopano zomverera, masensa maginito, physics ya spintronic, zipangizo ndi zipangizo kwa nthawi yaitali. Iye watsogolera ndi kutenga nawo mbali mu Japan "Kusokoneza Technology Innovation Plan" polojekiti, Japan Society for the Promotion of Science's science research fund basic research S-level project, A-level project, B-level project, pulojekiti yapadera yofufuza ndi projekiti ya Advanced Storage Technology Association, ndi zina., ndipo pakali pano akuyang'anira kafukufuku ndi chitukuko cha dziko Pali ntchito zambiri zofufuza za sayansi monga polojekiti ya asayansi achichepere, Ntchito ya National Natural Science Foundation, Ntchito ya Beijing Natural Science Foundation, Ntchito ya talente ya Chinese Academy of Sciences, Chida cha Chinese Academy of Sciences ndi ntchito yopititsa patsogolo ntchito, ndi projekiti yoperekedwa ndi bizinesi.

Module yosinthika nthawi zonse pakali pano yamagetsi yacharging treasure tester

Kalozera wankhani

Masensa a Fluxgate ndi mtundu wa ma sensor maginito a vector omwe amatha kuzindikira ma frequency otsika kapena maginito a DC.. Chifukwa cha ubwino wawo pakupanga chisankho, kutentha kukhazikika, kulondola ndi kuzindikira, amagwiritsidwa ntchito kwambiri poyika maginito navigation, kuzindikira malo, kudziwa mineral, Kuzindikira kwa Geomagnetic, kupezeka kwatsopano ndi magawo ena. Kuti mukwaniritse ntchito zomwe zikubwera zamagawo ang'onoang'ono ndi machitidwe, miniaturization ya masensa a fluxgate yakhala malo ofufuzira a fluxgate masensa. Microelectro-mechanical System (MEMS) processing imapereka maziko aukadaulo a miniaturization ya masensa a fluxgate. Pepalali likufotokoza mwachidule mfundo zoyambira za masensa a fluxgate, ndikufotokozera mbiri yachitukuko chaukadaulo wa sensa ya micro-fluxgate, kuphatikiza ukadaulo wa micromachining, PCB luso ndi luso la MEMS. Njira yachitukuko chaukadaulo waukadaulo wa MEMS fluxgate komanso kukula kwa MEMS orthogonal fluxgate ndi mwachidule., ndipo tsogolo la kafukufukuyu likuyembekezeka.

Mawu ofunika: Fluxgate sensor; MEMS; kuyeza kwa maginito; ntchito

1 Mawu Oyamba

Masensa a Fluxgate ndi gulu la masensa maginito a vector omwe amatha kuzindikira ma frequency otsika kapena maginito a DC.. Masensa achikale a fluxgate amagwiritsidwa ntchito kwambiri poyimitsa maginito, kuzindikira malo, kudziwa mineral, kuzindikira kwa geomagnetic, kupezeka kwamakono ndi madera ena chifukwa cha ubwino wawo pakukonza, kutentha kukhazikika, mwatsatanetsatane komanso tcheru. Ma drones osiyanasiyana, zipangizo zam'manja, ma micro satellites, masensa ang'onoang'ono, kampasi zazing'ono zamagetsi, biomedicine ndi magawo ena ogwiritsira ntchito ali ndi zofunikira zapamwamba pamtunduwo, kuchuluka, kugwiritsa ntchito mphamvu ndi kuphatikiza kwa fluxgates. Kuti mukwaniritse ntchito zomwe zikubwera zamagawo ang'onoang'ono ndi machitidwe, miniaturization ya masensa a fluxgate yakhala malo ofufuzira a masensa a fluxgate.

2 Mfundo ndi kapangidwe ka fluxgate yolimba

parallel fluxgate - Kukula Kwakafukufuku wa Sensor ya Fluxgate Yotengera Micro Electro Mechanical System (MEMS)

3 Fluxgate miniaturization mbiri
3.1 Micromachined Fluxgate
3.2 PCB Fluxgate
3.3 MEMS Fluxgate
4 Kafukufuku wa MEMS Fluxgate
4.1 Zamakono
4.2 Kapangidwe
4.3 Orthogonal Fluxgate
5 Kugwiritsa ntchito MEMS Fluxgate
5.1 Maloboti
5.2 Mayeso apano
5.3 Kuzindikira kwa Biomagnetic
5.4 Kufufuza kwa Space
6 Epilogue

Pomaliza

Pazaka makumi atatu zapitazi, fluxgates apita patsogolo kwambiri mu miniaturization, ndi mavuto a phokoso lalikulu, kukhudzika kochepa, ndi kutentha kwakukulu komwe kumachitika chifukwa cha miniaturization ya fluxgates kwasinthidwa. Tekinoloje ya MEMS pakali pano ndi malo otentha kwambiri mu miniaturization ya fluxgates. Fluxgates pogwiritsa ntchito luso la MEMS ali ndi makhalidwe abwino monga kukula kochepa, mtengo wotsika, kuphatikiza kwakukulu komanso kufananiza kwakukulu, ndipo akhala akugwiritsidwa ntchito kwambiri m'magawo ambiri.
Mtsogolomu, Ma fluxgate a MEMS amafunika kupititsa patsogolo kapangidwe kawo, kupanga ndondomeko, maginito core material, ndi kufananiza madera kuti mupeze ma probe okhala ndi chidwi chachikulu, phokoso lapansi, ndi kukwanira bwino kwamapangidwe. Pakadali pano, ukadaulo wa sensa yamitundu iwiri ya fluxgate yotengera ukadaulo wa MEMS ndi wokhwima. Amakhulupirira kuti ndi chitukuko chaukadaulo wa MEMS, Integrated MEMS atatu-axis fluxgate sensa siyenera kukhala patali.