Kufambira mberi kwekutsvagisa kweFluxgate Sensor Yakavakirwa paMicro Electro Mechanical System (MEMS)

Chikwata chaChen Jiamin kubva kuChinese Academy yeSainzi: Tsvagiridzo inofambira mberi pane fluxgate sensors yakavakirwa pane microelectromechanical masisitimu (MEMS)

Zvinyorwa zvinotevera zvinobva kudhipatimendi rekunyora remagineti zvinhu nemidziyo, uye munyori anobva kubazi rekunyora reMagnetic Journal

chisumo chechikwata

Mr. Chen Jiamin, muongorori we "State Key Laboratory yeSensing Technology" yeAerospace Information Innovation Institute yeChinese Academy yeSainzi, mutariri wechiremba, mumiriri we "Hundred Talents Program" yeChinese Academy yeSainzi, muongorori anokosha (kuyanana) yeJapan Society for the Promotion of Science (JSPS), IEEE Magnetics Nhengo yenzanga, nhengo yeNational Council of Materials and Devices Magnetic Materials Expert Group nyanzvi.

Inogadziriswa inogara iripo yemagetsi mutoro - kuchaja pfuma tester - kuchembera discharge module - fast charge uye discharge resistor

Anga achishanda mukutsvaga kwezvinhu zvitsva zvekunzwa, magnetic sensors, spintronic physics, zvinhu uye zvishandiso kwenguva yakareba. Akatungamira uye akatora chikamu muJapan "Inovhiringidza Technology Innovation Plan" project, iyo Japan Sosaiti Yekusimudzira yeSainzi homwe yekutsvagisa sainzi yekutanga tsvakiridzo yeS-level chirongwa, A-level project, B-level project, yakakosha yekutsvagisa chirongwa uye Advanced Storage Technology Association chirongwa, etc., uye parizvino ari kutungamira tsvakiridzo nebudiriro yenyika Kune akawanda mapurojekiti etsvakiridzo yesainzi akadai sekurongwa kwechirongwa chesainzi vechidiki, National Natural Science Foundation chirongwa, Beijing Natural Science Foundation chirongwa, Chinese Academy yeSainzi tarenda chirongwa, Chinese Academy yeSainzi chiridzwa uye michina basa rekuvandudza chirongwa, uye bhizinesi rakapihwa purojekiti.

Inogadziriswa inogara iripo yemagetsi mutoro wekuchaja treasure tester module

Chinyorwa chinotungamira

Fluxgate sensors imhando yevector magineti sensors inogona kuona isina kusimba yakaderera-frequency kana DC magineti minda.. Nekuda kwemabhenefiti avo mukugadzirisa, kugadzikana kwekushisa, kururama uye kunzwa, iwo anoshandiswa zvakanyanya mune magineti navigation chinzvimbo, kuona nzvimbo, kuona mineral, Geomagnetic kuonekwa, ikozvino kuonekwa uye mamwe minda. Kuti usangane nezviri kubuda mashandisirwo ezvidiki-zvikamu uye masisitimu, iyo miniaturization yefluxgate sensors yave nzvimbo yekutsvaga yefluxgate sensors. Micro-electro-mechanical System (MEMS) kugadzirisa kunopa hwaro hwehunyanzvi hweiyo miniaturization yefluxgate sensors. Iri bepa rinopfupisa nheyo dzekutanga dzefluxgate sensors, uye inotsanangura nhoroondo yekusimudzira ye micro-fluxgate sensor tekinoroji, kusanganisira micromachining tekinoroji, PCB tekinoroji uye tekinoroji yeMEMS. Iyo yekuvandudza maitiro eMEMS fluxgate chimiro tekinoroji uye chimiro chekusimudzira cheMEMS orthogonal fluxgate inopfupikiswa., uye tsvakiridzo yeramangwana mune ino ndima inotarisirwa.

Mazwi akakosha: fluxgate sensor; MEMS; chiyero chemagnetic; application

1 Nhanganyaya

Fluxgate sensors ikirasi yevector magineti sensors inogona kuona isina kusimba yakaderera-frequency kana DC magineti minda.. Traditional fluxgate sensors anoshandiswa zvakanyanya mune magineti navigation chinzvimbo, kuona nzvimbo, kuona mineral, geomagnetic kuwanikwa, ikozvino kuonekwa uye mamwe minda nekuda kwemabhenefiti avo mukugadzirisa, kugadzikana kwekushisa, kunyatsojeka uye kunzwa. Akasiyana-siyana ma microdrones, midziyo inobatwa nemaoko, micro satellites, micro current sensors, makompasi madiki emagetsi, biomedicine uye mamwe minda yekushandisa ane zvakakwirira zvinodiwa zvemhando, volume, kushandiswa kwesimba uye kubatanidzwa kwe fluxgates. Kuti usangane nezviri kubuda mashandisirwo ezvidiki-zvikamu uye masisitimu, iyo miniaturization yefluxgate sensors yave nzvimbo yekutsvaga yefluxgate sensors.

2 Nheyo uye chimiro cheiyo yakasimba fluxgate

parallel fluxgate - Kufambira mberi kwekutsvagisa kweFluxgate Sensor Yakavakirwa paMicro Electro Mechanical System (MEMS)

3 Fluxgate miniaturization nhoroondo
3.1 Micromachined Fluxgate
3.2 PCB Fluxgate
3.3 MEMS Fluxgate
4 MEMS Fluxgate Tsvagiridzo
4.1 Vadivelu Comedy Technology
4.2 Chimiro
4.3 Orthogonal Fluxgate
5 Kushandiswa kweMEMS Fluxgate
5.1 Robhoti
5.2 Current Test
5.3 Biomagnetic kuona
5.4 Space Exploration
6 Epilogue

mukupedzisa

Kwemakumi matatu emakore apfuura, fluxgates vakaita kufambira mberi kukuru mune miniaturization, uye matambudziko eruzha rwakanyanya, kuderera kwekunzwa, uye kupisa kukuru kwekushisa kunokonzerwa ne miniaturization ye fluxgates yakagadziridzwa. MEMS tekinoroji parizvino inzvimbo inopisa mune miniaturization yefluxgates. Fluxgates inoshandisa tekinoroji yeMEMS ine hunhu hwakanaka senge saizi diki, mutengo wakaderera, kubatanidzwa kwepamusoro uye kuenzana kwepamusoro, uye yakashandiswa zvakanyanya mundima dzakawanda.
Mune ramangwana, MEMS fluxgates inoda kuwedzera optimize chimiro chavo, kugadzira nzira, magnetic core material, uye kufananidzwa kwedunhu kuti uwane maprobes ane kunzwisiswa kwepamusoro, ruzha rwakaderera, uye zviri nani zvigadziriso zvinoenderana. Parizvino, iwo maviri-dimensional fluxgate sensor tekinoroji yakavakirwa paMEMS tekinoroji yakakura kwazvo. Zvinotendwa kuti nekuvandudzwa kweMEMS tekinoroji, iyo yakabatanidzwa MEMS matatu-axis fluxgate sensor haifanirwe kunge iri kure.