Kev Tshawb Fawb Kev Txhim Kho ntawm Fluxgate Sensor Raws li Micro Electro Mechanical System (MEMS)

Chen Jiamin pab neeg los ntawm Suav Academy ntawm Sciences: Kev tshawb fawb nce qib ntawm fluxgate sensors raws li microelectromechanical systems (MEMS)

Cov kab lus hauv qab no yog los ntawm lub tuam tsev kho mob ntawm cov khoom sib nqus thiab cov khoom siv, thiab tus kws sau ntawv yog los ntawm lub chaw kho mob ntawm Magnetic Journal

pab neeg taw qhia

Mr. Chen Yim, tus kws tshawb fawb ntawm lub "State Key Laboratory ntawm Sensing Technology" ntawm Aerospace Information Innovation Institute ntawm Suav Academy ntawm Sciences, ib tug kws kho mob saib xyuas, ib tug neeg sib tw ntawm lub "Hundred Talents Program" ntawm Suav Academy ntawm Sciences, tus kws tshawb fawb tshwj xeeb (kev sib raug zoo) ntawm Japan Society for the Promotion of Science (JSPS), IEEE Magnetics Tswvcuab ntawm lub zej zog, tus tswv cuab ntawm National Council of Materials and Devices Magnetic Materials Expert Group kws tshaj lij.

Adjustable tas li tam sim no hluav taws xob load - them cov khoom muaj nqis tester - aging tso tawm module - ceev ceev thiab tso tawm resistor

Nws tau koom nrog kev tshawb fawb ntawm cov ntaub ntawv tshiab, magnetic sensors, spintronic physics, cov ntaub ntawv thiab cov khoom siv rau lub sijhawm ntev. Nws tau ua tus thawj tswj hwm thiab koom nrog hauv Nyij Pooj "Disruptive Technology Innovation Plan" qhov project, Lub Koom Haum Nyij Pooj rau Kev Txhawb Kev Tshawb Fawb Kev Tshawb Fawb Txog Kev Tshawb Fawb Txog Kev Tshawb Fawb Kev Tshawb Fawb S-qib project, A-level project, B-level project, Kev tshawb fawb tshwj xeeb project thiab Advanced Storage Technology Association project, lwm., thiab tam sim no yog tus saib xyuas lub teb chaws tseem ceeb kev tshawb fawb thiab kev loj hlob Muaj ntau yam kev tshawb fawb txog kev tshawb fawb xws li kev npaj cov tub ntxhais hluas kws tshawb fawb project, National Natural Science Foundation qhov project, Beijing Natural Science Foundation qhov project, Suav Academy ntawm Sciences txuj ci project, Suav Academy ntawm Sciences ntsuas thiab cov cuab yeej ua haujlwm tsim kho qhov project, thiab enterprise entrusted project.

Adjustable tas li tam sim no hluav taws xob load them cov khoom muaj nqis tester module

Tshooj lus qhia

Fluxgate sensors yog ib hom vector magnetic sensors uas tuaj yeem kuaj xyuas qhov tsis muaj zog qis lossis DC magnetic teb. Vim lawv qhov zoo ntawm kev daws teeb meem, kub stability, raug thiab rhiab heev, lawv tau dav siv nyob rau hauv magnetic navigation positioning, nrhiav tau qhov chaw, nrhiav pom pob zeb hauv av, Geomagnetic ntes, nrhiav tam sim no thiab lwm qhov chaw. Txhawm rau ua kom tau raws li cov ntawv thov tshiab ntawm micro-cov khoom siv thiab cov tshuab, qhov miniaturization ntawm fluxgate sensors tau dhau los ua kev tshawb fawb hotspot ntawm fluxgate sensors. Micro-electro-mechanical System (MEMS) Kev ua haujlwm muab lub hauv paus kev ua haujlwm rau miniaturization ntawm fluxgate sensors. Daim ntawv no qhia txog cov hauv paus ntsiab lus ntawm fluxgate sensors, thiab nthuav tawm keeb kwm kev loj hlob ntawm micro-fluxgate sensor technology, suav nrog micromachining technology, PCB technology thiab MEMS technology. Cov txheej txheem kev txhim kho ntawm MEMS fluxgate qauv thev naus laus zis thiab kev txhim kho ntawm MEMS orthogonal fluxgate tau sau tseg, thiab yav tom ntej kev tshawb fawb tsom rau hauv daim teb no yog prospected.

Cov lus tseem ceeb: fluxgate sensor; MEMS; Sib nqus ntsuas; daim ntawv thov

1 Taw qhia

Fluxgate sensors yog ib chav kawm ntawm vector magnetic sensors uas tuaj yeem ntes cov tsis muaj zog qis lossis DC magnetic teb. Traditional fluxgate sensors yog dav siv nyob rau hauv magnetic navigation positioning, nrhiav tau qhov chaw, nrhiav pom pob zeb hauv av, geomagnetic ntes, kev tshawb nrhiav tam sim no thiab lwm qhov chaw vim lawv qhov zoo hauv kev daws teeb meem, kub stability, precision thiab rhiab heev. Ntau yam micro drones, khoom siv tes, micro satellites, micro tam sim no sensors, me me electronic compasss, biomedicine thiab lwm daim ntawv thov teb muaj kev xav tau ntau dua rau qhov zoo, ntim, kev siv hluav taws xob thiab kev sib xyaw ntawm fluxgates. Txhawm rau ua kom tau raws li cov ntawv thov tshiab ntawm micro-cov khoom siv thiab cov tshuab, qhov miniaturization ntawm fluxgate sensors tau dhau los ua kev tshawb fawb hotspot ntawm fluxgate sensors.

2 Txoj cai thiab cov qauv ntawm cov khoom fluxgate

parallel fluxgate - Kev Tshawb Fawb Kev Txhim Kho ntawm Fluxgate Sensor Raws li Micro Electro Mechanical System (MEMS)

3 Fluxgate miniaturization keeb kwm
3.1 Micromachined Fluxgate
3.2 PCB Fluxgate
3.3 MEMS Fluxgate
4 MEMS Fluxgate Kev Tshawb Fawb
4.1 Technology
4.2 Qauv
4.3 Orthogonal Fluxgate
5 Kev thov ntawm MEMS Fluxgate
5.1 Cov neeg hlau
5.2 Kev sim tam sim no
5.3 Kev tshawb nrhiav biomagnetic
5.4 Kev tshawb nrhiav chaw
6 Epilogue

nyob rau hauv xaus

Tshaj li peb xyoos dhau los, fluxgates tau ua tau zoo nyob rau hauv miniaturization, thiab cov teeb meem ntawm lub suab nrov, qis rhiab heev, thiab qhov kub thiab txias drift tshwm sim los ntawm miniaturization ntawm fluxgates tau txhim kho. MEMS thev naus laus zis tam sim no yog qhov chaw kub tshaj plaws hauv kev ua haujlwm me me ntawm fluxgates. Fluxgates siv MEMS thev naus laus zis muaj cov yam ntxwv zoo xws li qhov me me, tus nqi qis, kev sib xyaw ua ke siab thiab kev sib txuam siab, thiab tau siv dav hauv ntau qhov chaw.
Yav tom ntej, MEMS fluxgates yuav tsum tau ua kom zoo dua lawv cov qauv, kev tsim khoom, magnetic core khoom, thiab Circuit Court txuam kom tau txais kev sojntsuam nrog ntau dua rhiab heev, qis suab nrov, thiab zoo structural haum. Tam sim no, ob-dimensional fluxgate sensor tshuab raws li MEMS thev naus laus zis yog qhov paub tab heev. Nws ntseeg tau tias nrog kev txhim kho ntawm MEMS thev naus laus zis, Kev sib xyaw MEMS peb-axis fluxgate sensor yuav tsum tsis txhob nyob deb.